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Anisotropic surface properties of micro/nanostructured a-C:H:F thin films with self-assembly applications
Freire Soler, Víctor Manuel; Corbella Roca, Carles; Bertrán Serra, Enric; Portal-Marco, S.; Rubio-Roy, M.; Andújar Bella, José Luis
Universitat de Barcelona
The singular properties of hydrogenated amorphous carbon (a-C:H) thin filmsdeposited by pulsed DC plasma enhanced chemical vapor deposition (PECVD), such as hardness and wear resistance, make it suitable as protective coating with low surface energy for self-assembly applications. In this paper, we designed fluorine-containing a-C:H (a-C:H:F) nanostructured surfaces and we characterized them for self-assembly applications. Sub-micron patterns were generated on silicon through laser lithography while contact angle measurements, nanotribometer, atomic force microscopy (AFM), and scanning electron microscopy (SEM) were used to characterize the surface. a-C:H:F properties on lithographied surfaces such as hydrophobicity and friction were improved with the proper relative quantity of CH4 and CHF3 during deposition, resulting in ultrahydrophobic samples and low friction coefficients. Furthermore, these properties were enhanced along the direction of the lithographypatterns (in-plane anisotropy). Finally, self-assembly properties were tested with silicananoparticles, which were successfully assembled in linear arrays following the generated patterns. Among the main applications, these surfaces could be suitable as particle filter selector and cell colony substrate.
Carboni
Pel·lícules fines
Microelectrònica
Anisotropia
Nanopartícules
Materials biomèdics
Carbon
Thin films
Microelectronics
Anisotropy
Nanoparticles
Biomedical materials
(c) American Institute of Physics , 2012
Article
info:eu-repo/semantics/publishedVersion
American Institute of Physics
         

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