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dc.contributor | Universitat de Barcelona |
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dc.contributor.author | Soler i Vilamitjana, David |
dc.contributor.author | Fonrodona Turon, Marta |
dc.contributor.author | Voz Sánchez, Cristóbal |
dc.contributor.author | Bertomeu i Balagueró, Joan |
dc.contributor.author | Andreu i Batallé, Jordi |
dc.date | 2013-10-29T15:26:05Z |
dc.date | 2013-10-29T15:26:05Z |
dc.date | 2001 |
dc.date | 2013-10-29T15:26:05Z |
dc.identifier.citation | 0040-6090 |
dc.identifier.citation | 160000 |
dc.identifier.uri | http://hdl.handle.net/2445/47380 |
dc.description.abstract | In this paper, we have presented results on silicon thin films deposited by hot-wire CVD at low substrate temperatures (200 °C). Films ranging from amorphous to nanocrystalline were obtained by varying the filament temperature from 1500 to 1800 °C. A crystalline fraction of 50% was obtained for the sample deposited at 1700 °C. The results obtained seemed to indicate that atomic hydrogen plays a leading role in the obtaining of nanocrystalline silicon. The optoelectronic properties of the amorphous material obtained in these conditions are slightly poorer than the ones observed in device-grade films grown by plasma-enhanced CVD due to a higher hydrogen incorporation (13%). |
dc.format | 4 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | Elsevier B.V. |
dc.relation | Versió postprint del document publicat a: http://dx.doi.org/10.1016/S0040-6090(00)01615-1 |
dc.relation | Thin Solid Films, 2001, vol. 383, num. 1-2, p. 189-191 |
dc.relation | http://dx.doi.org/10.1016/S0040-6090(00)01615-1 |
dc.rights | (c) Elsevier B.V., 2001 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Silici |
dc.subject | Pel·lícules fines |
dc.subject | Nanocristalls |
dc.subject | Deposició en fase de vapor |
dc.subject | Cèl·lules solars |
dc.subject | Silicon |
dc.subject | Thin films |
dc.subject | Nanocrystals |
dc.subject | Vapor-plating |
dc.subject | Solar cells |
dc.title | Thin silicon films ranging from amorphous to nanocrystalline obtained by Hot-Wire CVD |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/acceptedVersion |