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Microstructure of highly oriented, hexagonal, boron nitride thin films grown on crystalline silicon by radio frequency plasma-assisted chemical vapor deposition
Andújar Bella, José Luis; Bertrán Serra, Enric; Manniete, Y.
Universitat de Barcelona
2012-10-09
Superfícies (Tecnologia)
Pel·lícules fines
Materials nanoestructurals
Nitrur de bor
Surfaces (Technology
Thin films
Nanostructured materials
Boron nitride
(c) American Institute of Physics , 1996
Article
info:eu-repo/semantics/publishedVersion
American Institute of Physics
         

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