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Microstructure of highly oriented, hexagonal, boron nitride thin films grown on crystalline silicon by radio frequency plasma-assisted chemical vapor deposition
Andújar Bella, José Luis; Bertrán Serra, Enric; Manniete, Y.
Universitat de Barcelona
Superfícies (Tecnologia)
Pel·lícules fines
Materials nanoestructurals
Nitrur de bor
Surfaces (Technology
Thin films
Nanostructured materials
Boron nitride
(c) American Institute of Physics , 1996
American Institute of Physics

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