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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | De Wolf, I. |
dc.contributor.author | Vanhellemont, J. |
dc.contributor.author | Romano Rodríguez, Alberto |
dc.contributor.author | Norström, H. |
dc.contributor.author | Maes, H.E. |
dc.date | 2012-10-08T11:57:11Z |
dc.date | 2012-10-08T11:57:11Z |
dc.date | 1992 |
dc.date | 2012-10-08T11:57:11Z |
dc.identifier.citation | 0021-8979 |
dc.identifier.citation | 051464 |
dc.identifier.uri | http://hdl.handle.net/2445/32218 |
dc.format | 9 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.351311 |
dc.relation | Journal of Applied Physics, 1992, vol. 71, num. 2, p. 898-906 |
dc.relation | http://dx.doi.org/10.1063/1.351311 |
dc.rights | (c) American Institute of Physics , 1992 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Pel·lícules fines |
dc.subject | Química física |
dc.subject | Thin films |
dc.subject | Physical and theoretical chemistry |
dc.title | Micro-Raman study of stress distribution in local isolation structures and correlation with transmission electron microscopy |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.description.abstract |