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Numerical algorithm for spectroscopic ellipsometry of thick transparent films
Bosch i Puig, Salvador; Pérez Tudela, Julio D.; Canillas i Biosca, Adolf
Universitat de Barcelona
We present a numerical method for spectroscopic ellipsometry of thick transparent films. When an analytical expression for the dispersion of the refractive index (which contains several unknown coefficients) is assumed, the procedure is based on fitting the coefficients at a fixed thickness. Then the thickness is varied within a range (according to its approximate value). The final result given by our method is as follows: The sample thickness is considered to be the one that gives the best fitting. The refractive index is defined by the coefficients obtained for this thickness.
2012-07-13
El·lipsometria
Anàlisi numèrica
Ellipsometry
Numerical analysis
(c) Optical Society of America, 1998
Article
Optical Society of America
         

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