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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.contributor.author | Blokhina, Elena |
dc.contributor.author | Gorreta Mariné, Sergio |
dc.contributor.author | Lopez, David |
dc.contributor.author | Molinero Giles, David |
dc.contributor.author | Feely, Orla |
dc.contributor.author | Pons Nin, Joan |
dc.contributor.author | Domínguez Pumar, Manuel |
dc.date | 2012-06 |
dc.identifier.citation | Blokhina, E. [et al.]. Dielectric charge control in electrostatic MEMS positioners/varactors. "Journal of microelectromechanical systems", Juny 2012, vol. 21, núm. 3, p. 559-573. |
dc.identifier.citation | 1057-7157 |
dc.identifier.citation | 10.1109/JMEMS.2011.2182500 |
dc.identifier.uri | http://hdl.handle.net/2117/16137 |
dc.language.iso | eng |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
dc.subject | Microelectronics |
dc.subject | Microelectromechanical systems |
dc.subject | Sistemes microelectromecànics |
dc.subject | Microelectrònica |
dc.title | Dielectric charge control in electrostatic MEMS positioners/varactors |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.type | info:eu-repo/semantics/article |
dc.description.abstract | |
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