Title:
|
A self-test and dynamics characterization circuit for MEMS electrostatic actuators
|
Author:
|
Fernández Martínez, Daniel; Madrenas Boadas, Jordi; Cosp Vilella, Jordi
|
Other authors:
|
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. AHA - Arquitectures Hardware Avançades |
Abstract:
|
This paper presents a high-bandwidth capacitance estimation and driving circuit especially tailored for its use with MEMS electrostatic actuators. The circuit can be integrated as a part of a system comprising
an electrostatic actuator to provide self-testing and failure prediction capabilities and also as a simple and
low-cost actuator dynamics characterization system capable of measuring both periodic and nonperiodic movements. |
Abstract:
|
Peer Reviewed |
Subject(s):
|
-Àrees temàtiques de la UPC::Informàtica::Hardware -MEMS -Microelectromechanical systems -Actuators -- Design and construction -Electrostatic actuators -Sistemes microelectromecànics -Actuadors |
Rights:
|
|
Document type:
|
Article - Published version Article |
Share:
|
|