Activation of different MEMS resonant modes with pulsed digital oscillators

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To access the full text documents, please follow this link: http://hdl.handle.net/2117/10666

dc.contributor	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.contributor	Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.contributor.author	Domínguez Pumar, Manuel
dc.contributor.author	Blokhina, Elena
dc.contributor.author	Pons Nin, Joan
dc.contributor.author	Feely, Orla
dc.contributor.author	Sanchez Rojas, Jose Luis
dc.date	2010
dc.identifier.citation	Dominguez, M. [et al.]. Activation of different MEMS resonant modes with pulsed digital oscillators. A: Sensoren und Messsysteme. "Sesnoren und Messsysteme 2010". Nürnberg: Springer Verlag, 2010, p. 316-322.
dc.identifier.citation	978-3-8007-3260-9
dc.identifier.uri	http://hdl.handle.net/2117/10666
dc.language.iso	eng
dc.publisher	Springer Verlag
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	Àrees temàtiques de la UPC::Enginyeria electrònica
dc.subject	Microelectromechanical systems
dc.subject	Electronic engineering
dc.subject	Pulsed Digital Oscillators
dc.subject	Oscil·ladors
dc.subject	Electrònica
dc.title	Activation of different MEMS resonant modes with pulsed digital oscillators
dc.type	info:eu-repo/semantics/publishedVersion
dc.type	info:eu-repo/semantics/conferenceObject
dc.description.abstract	The objective of this work is to show that is possible to excite different vibration modes of MEMS resonators using Pulsed Digital Oscillators. This class of circuits exhibit two different behaviours: the oscillation and the anti-oscillation mode. In the oscillation mode, th eoscillator in average provides energy to the resonator, whereas in the anti-oscillation mode, it extracts energy of the resonator until a limit cyucle is reached near the origin. It will be shown that by preparing suitable PDO configurations it is possible to selectively excite different resonant modes of MEMS resonator. The exprimental corroboration has been obtained with a scanning Doopler vibrometer.

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