Title:
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Capacitive and resistive RF-MEMS switches 2.5D & 3D Electromagnetic and Circuit modelling
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Author:
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Giacomozzi, Flavio; Colpo, S.; Plana, Robert; Llamas Morote, Marco Antonio; Girbau Sala, David; Pausas, Esther; Pradell i Cara, Lluís; Aouba, Stephane; Villneuve, C.; Puyal, Vincent; Pons, Patrick
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Other authors:
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Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
Abstract:
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this paper proposes different strategies for the
electrical modelling of capacitive and resistive RF-MEMS
switches which take into account the dependence of the electrical
performance on the mechanical properties and technological
processes. The EM modelling of MEMS switches is addressed
with 2.5D and 3D full wave EM softwares. More specifically,
ADS-MomentumTM (2.5D) and EMDSTM (3D) from Agilent
Technologies are used. Capacitive RF-MEMS switches were
fabricated with the LAAS-CNRS 6-mask RF-MEMS process in
Toulouse, France, and resistive RF-MEMS switches were
fabricated with the FBK-irst 8-mask RF-MEMS process in
Trento, Italy. It is shown that, by applying the proposed
strategies, 2.5D and 3D simulations are in good agreement with
characterization results. |
Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació -Signal theory (Telecommunication) -RF MEMS (Radio frequency microelectromechanical systems) -Microwaves -Senyal, Teoria del (Telecomunicació) |
Rights:
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Document type:
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Article - Published version Conference Object |
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