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Title:
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A novel Σ-Δ pulsed digital oscillator (PDO) for MEMS
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Author:
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Domínguez Pumar, Manuel; Pons Nin, Joan; Ricart Campos, Jordi; Bermejo Pelayo, Agustin; Figueras Costa, Eduardo
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Other authors:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
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Abstract:
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A novel digital oscillator topology for microelectromechanical
systems (MEMS) based on bandpass sigma–delta modulation
is presented. Short pulses of force of the same amplitude maintain
the oscillation and the associated bit-stream output serves to
know the oscillation frequency which, for low mechanical losses, is
very close to the natural frequency of the MEMS resonator. Position-
sensing requirements are extremely simplified because, at
each sampling time, it is only necessary to know whether the resonator
position is above or below the steady-state position. Continuous-
time simulations are presented showing the behavior of
the oscillator for different sampling frequencies and mechanical
damping losses. Experimental results from an oscillator using a
MEMS resonator with thermoelectric actuation and piezoresitive
position sensing are presented. It is concluded that the quality of
the oscillator response depends on the resonator damping losses
and on the sampling frequency. The experimental results agree
with the analytical and simulation results. |
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Abstract:
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Peer Reviewed |
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Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
-Microelectromechanical systems.
-Oscillations.
-Bandpass sigma-delta modulation
-Circuit oscillations
-Continuous-time simulation
-Digital oscillator topology
-Mechanical damping loss
-Micromechanical resonators
-Natural frequency
-Oscillation frequency
-Piezoresistive position sensing
-Resonator damping loss
-Sampling frequency
-Steady-state position
-Thermoelectric devices
-Σ-Δ pulsed digital oscillator
-MEMS resonator
-PDO
-Sistemes microelectromecànics
-Oscil·ladors |
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Rights:
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Document type:
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Article |
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Published by:
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IEEE
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Share:
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