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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.contributor.author | Molinero Giles, David |
dc.contributor.author | Comulada Simpson, Ricard |
dc.contributor.author | Castañer Muñoz, Luis María |
dc.date | 2006-02-14 |
dc.identifier.citation | Molinero, D.; Comulada, R.; Castañer, L. Dielectric charge measurements in capacitive microelectromechanical switches. Applied Physics Letters, 2006, vol. 89, 103506. |
dc.identifier.uri | http://hdl.handle.net/2117/2461 |
dc.language.iso | spa |
dc.publisher | American Institute of Physics |
dc.relation | TEC2004-00236 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
dc.subject | Microelectromechanical systems |
dc.subject | Electric discharges |
dc.subject | Capacitive microelectromechanical switches |
dc.subject | C-V characteristics |
dc.subject | Charge dynamics |
dc.subject | Dielectric charge measurements |
dc.subject | Discharges (electric) |
dc.subject | Electrical resistivity |
dc.subject | Ion gun |
dc.subject | Microswitches |
dc.subject | Permittivity |
dc.subject | Pull-in shift |
dc.subject | Resistivity-permittivity product |
dc.subject | Time constants |
dc.subject | Transient currents |
dc.subject | Sistemes microelectromecànics |
dc.subject | Descàrregues elèctriques |
dc.title | Dielectric charge measurements in capacitive microelectromechanical switches |
dc.type | info:eu-repo/semantics/article |
dc.description.abstract | |
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