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Dielectric charge measurements in capacitive microelectromechanical switches
Molinero Giles, David; Comulada Simpson, Ricard; Castañer Muñoz, Luis María
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Measurements of transient currents from the discharge of microelectromechanical capacitive switches after charging the dielectric with an ion gun are reported. It is shown that both the charge sign and the charge amount can be independently measured and that the values can be related to the pull-in shift as measured from C-V characteristics. Several capacitive switches of different sizes were fabricated and subjected to charging and discharging experiments. The analysis of the transients shows that several time constants are governing the charge dynamics, one of them is related to the resistivity-permittivity product of the dielectric.
Peer Reviewed
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
Microelectromechanical systems
Electric discharges
Capacitive microelectromechanical switches
C-V characteristics
Charge dynamics
Dielectric charge measurements
Discharges (electric)
Electrical resistivity
Ion gun
Pull-in shift
Resistivity-permittivity product
Time constants
Transient currents
Sistemes microelectromecànics
Descàrregues elèctriques
American Institute of Physics

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