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Comparison of air gap breakdown and substrate injection as mechanisms to induce dielectric charching in microelectromechanical switches
Molinero Giles, David; Castañer Muñoz, Luis María
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
Microelectromechanical systems.
Breakdown (Electricity)
Air gap breakdown
Dielectric charging
Dielectric layer
Dielectric thin films
Electric breakdown
Electrical stress
Microelectromechanical switches
Reliability
Substrate carrier conduction
Substrate injection
MEMS
Sistemes microelectromecànics
Article
American Institute of Physics
         

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