Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches.

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To access the full text documents, please follow this link: http://hdl.handle.net/2117/1779

dc.contributor	Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions
dc.contributor	Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
dc.contributor.author	Lázaro Guillén, Antoni
dc.contributor.author	Girbau Sala, David
dc.contributor.author	Pradell i Cara, Lluís
dc.contributor.author	Nebot Serra, Àlvar
dc.date	2006-10
dc.identifier.citation	Lazaro, A.; Girbau, D.; Pradell, L., Nebot, A. Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches. MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2007, vol. 49, núm. 6, p. 1238-1241.
dc.identifier.citation	0895-2477
dc.identifier.uri	http://hdl.handle.net/2117/1779
dc.language.iso	eng
dc.publisher	JOHN WILEY & SONS INC
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
dc.subject	Iterative methods (Mathematics)
dc.subject	Microelectromechanical systems
dc.subject	Electrostatic actuators
dc.subject	Finite difference methods
dc.subject	Iterative methods
dc.subject	Microswitches
dc.subject	Relaxation theory
dc.subject	Nonlinear actuation model
dc.subject	Electrostatically-actuated DC-contact RF MEMS
dc.subject	RF MEMS series switches
dc.subject	Equilibrium equation
dc.subject	Elastic beam
dc.subject	Finite-difference discretization
dc.subject	Gauss-Seidel relaxation iteration scheme
dc.subject	Mètodes iteratius (Matemàtica)
dc.subject	Microelectromechanical systems
dc.title	Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches.
dc.type	info:eu-repo/semantics/article
dc.description.abstract	In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation cannot be applied. The model is based on the equilibrium equation for an elastic beam. It is demonstrated that the contribution of fringing fields is essential. The model relies on finite-difference discretization of the structures, applying boundary conditions and is solved with a Gauss- Seidel relaxation iteration scheme. Its usefulness is demonstrated in a series MEMS switch with lateral interdigital electrostatic actuation.
dc.description.abstract	Peer Reviewed

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