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Título:
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Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches.
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Autor/a:
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Lázaro Guillén, Antoni; Girbau Sala, David; Pradell i Cara, Lluís; Nebot Serra, Àlvar
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Otros autores:
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Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
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Abstract:
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In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS
switches is proposed. In this case a parallel-plate approximation cannot
be applied. The model is based on the equilibrium equation for an elastic
beam. It is demonstrated that the contribution of fringing fields is
essential. The model relies on finite-difference discretization of the
structures, applying boundary conditions and is solved with a Gauss-
Seidel relaxation iteration scheme. Its usefulness is demonstrated in a series
MEMS switch with lateral interdigital electrostatic actuation. |
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Abstract:
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Peer Reviewed |
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Materia(s):
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-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
-Iterative methods (Mathematics)
-Microelectromechanical systems
-Electrostatic actuators
-Finite difference methods
-Iterative methods
-Microswitches
-Relaxation theory
-Nonlinear actuation model
-Electrostatically-actuated DC-contact RF MEMS
-RF MEMS series switches
-Equilibrium equation
-Elastic beam
-Finite-difference discretization
-Gauss-Seidel relaxation iteration scheme
-Mètodes iteratius (Matemàtica)
-Microelectromechanical systems |
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Derechos:
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Tipo de documento:
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Artículo |
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Editor:
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JOHN WILEY & SONS INC
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Compartir:
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