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Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches.
Lázaro Guillén, Antoni; Girbau Sala, David; Pradell i Cara, Lluís; Nebot Serra, Àlvar
Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation cannot be applied. The model is based on the equilibrium equation for an elastic beam. It is demonstrated that the contribution of fringing fields is essential. The model relies on finite-difference discretization of the structures, applying boundary conditions and is solved with a Gauss- Seidel relaxation iteration scheme. Its usefulness is demonstrated in a series MEMS switch with lateral interdigital electrostatic actuation.
Peer Reviewed
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
Iterative methods (Mathematics)
Microelectromechanical systems
Electrostatic actuators
Finite difference methods
Iterative methods
Microswitches
Relaxation theory
Nonlinear actuation model
Electrostatically-actuated DC-contact RF MEMS
RF MEMS series switches
Equilibrium equation
Elastic beam
Finite-difference discretization
Gauss-Seidel relaxation iteration scheme
Mètodes iteratius (Matemàtica)
Microelectromechanical systems
Article
JOHN WILEY & SONS INC
         

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