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dc.contributor | Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions |
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dc.contributor | Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
dc.contributor.author | Girbau Sala, David |
dc.contributor.author | Llamas Morote, Marco Antonio |
dc.contributor.author | Casals Terré, Jasmina |
dc.contributor.author | Simó Selvas, Francisco Javier |
dc.contributor.author | Pradell i Cara, Lluís |
dc.contributor.author | Lázaro Guillén, Antoni |
dc.date | 2007-06 |
dc.identifier.citation | Girbau, D.; Llamas, M. A.; Casals, J.; Simó, X.; Pradell, L.; Lázaro, A. A low-power-consumption out-of-Plane electrothermal actuator. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, vol. 16, núm. 3, p. 719-727. |
dc.identifier.citation | 1057-7157 |
dc.identifier.uri | http://hdl.handle.net/2117/1780 |
dc.language.iso | eng |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques |
dc.subject | Microelectromechanical systems |
dc.subject | Capacitors |
dc.subject | Capacitors |
dc.subject | Finite element analysis |
dc.subject | Low-power electronics |
dc.subject | Microactuators |
dc.subject | MEMS |
dc.subject | parallel-plate capacitors |
dc.subject | Finite-element analysis |
dc.subject | Vertical hot-cold actuator |
dc.subject | In-plane buckle-beam actuator |
dc.subject | Electrothermal actuator |
dc.subject | Low-power-consumption |
dc.subject | Microelectromechanical systems |
dc.title | A low-power-consumption out-of-Plane electrothermal actuator |
dc.type | info:eu-repo/semantics/article |
dc.description.abstract | |
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