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dc.contributor | Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions |
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dc.contributor | Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
dc.contributor.author | Girbau Sala, David |
dc.contributor.author | Pradell i Cara, Lluís |
dc.contributor.author | Lázaro Guillén, Antoni |
dc.contributor.author | Nebot Serra, Àlvar |
dc.date | 2007-10 |
dc.identifier.citation | Girbau, D.; Pradell, L.; Lazaro, A.; Nebot, A. Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate. Journal of microelectromechanical systems, 2007, vol. 16, núm. 5, p. 1061-1070. |
dc.identifier.citation | 1057-7157 |
dc.identifier.uri | http://hdl.handle.net/2117/1798 |
dc.language.iso | eng |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
dc.subject | Microelectromechanical systems |
dc.subject | microwave switches |
dc.subject | microswitches |
dc.subject | loss -0.26 dB |
dc.subject | loss -0.65 dB |
dc.subject | loss -29 dB |
dc.subject | loss -25 dB |
dc.subject | frequency 1 GHz |
dc.subject | frequency 6 GHz |
dc.subject | electrothermally actuated RF MEMS switches |
dc.subject | low-resistivity substrate |
dc.subject | electrothermally actuated lateral resistive-contact switch |
dc.subject | low-gigahertz-band communication systems |
dc.subject | system-on-chip concept |
dc.subject | metal electrothermal actuator |
dc.subject | contact forces |
dc.subject | polysilicon electrothermal actuators |
dc.subject | RF power handling characteristics |
dc.subject | microelectromechanical systems switch |
dc.subject | Sistemes microelectromecànics |
dc.title | Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate |
dc.type | info:eu-repo/semantics/article |
dc.description.abstract | |
dc.description.abstract |