Para acceder a los documentos con el texto completo, por favor, siga el siguiente enlace: http://hdl.handle.net/2117/1798

Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate
Girbau Sala, David; Pradell i Cara, Lluís; Lázaro Guillén, Antoni; Nebot Serra, Àlvar
Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
This paper presents an electrothermally actuated lateral resistive-contact switch for application to low-gigahertz-band communication systems. It was manufactured on a standard low-resistivity substrate, and its RF performance was improved by suspending the structures 25 μm from the substrate, which is a strategy for future integration with active devices in the system-on-chip concept. Measured insertion losses are−0.26 dB at 1 GHz and −0.65 dB at 6 GHz, return losses are −29 dB at 1 GHz and −25 dB at 6 GHz, and isolations are −52 dB at 1 GHz and −26 dB at 6 GHz. The device is driven by a metal electrothermal actuator, which achieves large displacements and contact forces at much lower temperatures than traditional polysilicon electrothermal actuators. The RF power handling characteristics are also addressed and measured.
Peer Reviewed
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
Microelectromechanical systems
microwave switches
microswitches
loss -0.26 dB
loss -0.65 dB
loss -29 dB
loss -25 dB
frequency 1 GHz
frequency 6 GHz
electrothermally actuated RF MEMS switches
low-resistivity substrate
electrothermally actuated lateral resistive-contact switch
low-gigahertz-band communication systems
system-on-chip concept
metal electrothermal actuator
contact forces
polysilicon electrothermal actuators
RF power handling characteristics
microelectromechanical systems switch
Sistemes microelectromecànics
Artículo
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
         

Mostrar el registro completo del ítem

Documentos relacionados

Otros documentos del mismo autor/a

Lázaro Guillén, Antoni; Girbau Sala, David; Pradell i Cara, Lluís; Nebot Serra, Àlvar
Girbau Sala, David; Lázaro Guillén, Antoni; Pérez, A.; Martínez, Ester; Pradell i Cara, Lluís; Villarino Villarino, Ramón
Llamas Morote, Marco Antonio; Girbau Sala, David; Pradell i Cara, Lluís; Lázaro Guillén, Antoni; Giacomozzi, Flavio; Colpo, S
Girbau Sala, David; Lázaro Guillén, Antoni; Obiols Pérez, Alberto; Martínez, Ester; Pradell i Cara, Lluís; Villarino Villarino, Ramón
Girbau Sala, David; Lázaro Guillén, Antoni; Pradell i Cara, Lluís