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Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate
Girbau Sala, David; Pradell i Cara, Lluís; Lázaro Guillén, Antoni; Nebot Serra, Àlvar
Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
Microelectromechanical systems
microwave switches
microswitches
loss -0.26 dB
loss -0.65 dB
loss -29 dB
loss -25 dB
frequency 1 GHz
frequency 6 GHz
electrothermally actuated RF MEMS switches
low-resistivity substrate
electrothermally actuated lateral resistive-contact switch
low-gigahertz-band communication systems
system-on-chip concept
metal electrothermal actuator
contact forces
polysilicon electrothermal actuators
RF power handling characteristics
microelectromechanical systems switch
Sistemes microelectromecànics
Article
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
         

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