In this work, a model that uses several nonlinear parameters to predict harmonics and 3IMD distortion is presented. Its novelty lies in its ability to predict the nonlinear effects produced by self-heating in addition to those due to intrinsic nonlinearities in the material properties. The model can be considered an extension of the nonlinear KLM model (originally proposed by Krimholtz, Leedom and Matthaei) (Krimholtz et al., 1970) to include the thermal effects due to self-heating caused by viscous losses and electrode losses. For this purpose a thermal domain circuit model is implemented and coupled to the electro-acoustic model, which allows us to calculate the dynamic temperature variations that change the material properties. In comparison to (Rocas et al., 2009), this work describes the impact that electrode losses produce on the 3IMD, presents closed-form expressions derived from the circuit model and validates the model with extensive measurements that confirm the necessity to include dynamic self-heating to accurately predict the generation of spurious signals in BAW devices.

Peer Reviewed