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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Roca i Cabarrocas, P. (Pere) |
dc.contributor.author | Chevrier, J. B. |
dc.contributor.author | Huc, J. |
dc.contributor.author | Lloret, A. |
dc.contributor.author | Parey, J. Y. |
dc.contributor.author | Schmitt, J. P. M. |
dc.date | 2012-05-08T07:52:26Z |
dc.date | 2012-05-08T07:52:26Z |
dc.date | 1997-07 |
dc.date | 2012-05-04T10:29:12Z |
dc.identifier.citation | 0734-2101 |
dc.identifier.citation | 507712 |
dc.identifier.uri | http://hdl.handle.net/2445/25054 |
dc.format | 11 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | Reproducció del document publicat a: http://dx.doi.org/10.1116/1.577318 |
dc.relation | Journal of Vacuum Science Technology A-Vacuum Surfaces and Films, 1991, vol. 9, núm. 4, p. 2331 |
dc.relation | http://dx.doi.org/10.1116/1.577318 |
dc.rights | (c) American Institute of Physics, 1991 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Pel·lícules fines |
dc.subject | Semiconductors amorfs |
dc.subject | Radiofreqüència |
dc.subject | Cèl·lules solars |
dc.subject | Thin films |
dc.subject | Amorphous semiconductors |
dc.subject | Radio frequency |
dc.subject | Solar cells |
dc.title | A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.description.abstract |