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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Lousa Rodríguez, Arturo |
dc.contributor.author | Gimeno, S. |
dc.date | 2012-05-08T07:49:06Z |
dc.date | 2012-05-08T07:49:06Z |
dc.date | 1997-01 |
dc.date | 2012-05-04T10:28:58Z |
dc.identifier.citation | 0734-2101 |
dc.identifier.citation | 503374 |
dc.identifier.uri | http://hdl.handle.net/2445/25053 |
dc.format | 4 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | Reproducció del document publicat a: http://dx.doi.org/10.1116/1.580477 |
dc.relation | Journal of Vacuum Science Technology A-Vacuum Surfaces and Films, 1997, vol. 15, num. 1, p. 62-66 |
dc.relation | http://dx.doi.org/10.1116/1.580477 |
dc.rights | (c) American Institute of Physics, 1997 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Pel·lícules fines |
dc.subject | Radiofreqüència |
dc.subject | Ions |
dc.subject | Nitrur de bor |
dc.subject | Thin films |
dc.subject | Radio frequency |
dc.subject | Ions |
dc.subject | Boron nitride |
dc.title | Ion assisted deposition of thin films by substrate tuned radio frequency magnetron sputtering |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.description.abstract |