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Ion assisted deposition of thin films by substrate tuned radio frequency magnetron sputtering
Lousa Rodríguez, Arturo; Gimeno, S.
Universitat de Barcelona
2012-05-08
Pel·lícules fines
Radiofreqüència
Ions
Nitrur de bor
Thin films
Radio frequency
Ions
Boron nitride
(c) American Institute of Physics 1997
Article
American Institute of Physics
         

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