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Plasma-enhanced chemical vapor deposition of boron nitride thin films from B2H6-H2-NH3 and B2H6-N2 gas mixtures
Andújar Bella, José Luis; Bertrán Serra, Enric; Polo Trasancos, Ma. del Carmen
Universitat de Barcelona
2012-05-08
Nitrur de bor
Pel·lícules fines
Microelectrònica
Electroquímica
Boron nitride
Thin films
Microelectronics
Electrochemistry
(c) American Institute of Physics 1998
Article
American Institute of Physics
         

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