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Plasma-enhanced chemical vapor deposition of boron nitride thin films from B2H6-H2-NH3 and B2H6-N2 gas mixtures
Andújar Bella, José Luis; Bertrán Serra, Enric; Polo Trasancos, Ma. del Carmen
Universitat de Barcelona
Nitrur de bor
Pel·lícules fines
Microelectrònica
Electroquímica
Boron nitride
Thin films
Microelectronics
Electrochemistry
(c) American Institute of Physics 1998
Article
American Institute of Physics
         

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