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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Canillas i Biosca, Adolf |
dc.contributor.author | Pascual Miralles, Esther |
dc.contributor.author | Drévillon, B. |
dc.date | 2012-05-08T08:09:12Z |
dc.date | 2012-05-08T08:09:12Z |
dc.date | 1993-08 |
dc.identifier.citation | 0034-6748 |
dc.identifier.citation | 71316 |
dc.identifier.uri | http://hdl.handle.net/2445/25058 |
dc.format | 7 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.1143953 |
dc.relation | Review of Scientific Instruments, 1993, vol. 64, num. 8, p. 2153-2159 |
dc.relation | http://dx.doi.org/10.1063/1.1143953 |
dc.rights | (c) American Institute of Physics, 1993 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | El·lipsometria |
dc.subject | Fourier transformations |
dc.subject | Espectroscòpia infraroja |
dc.subject | Pel·lícules fines |
dc.subject | Ellipsometry |
dc.subject | Fourier transformations |
dc.subject | Infrared spectroscopy |
dc.subject | Thin films |
dc.title | Phase-modulated ellipsometer using a Fourier transform infrared spectrometer for real time applications |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.description.abstract |