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X-ray photoelectron spectroscopy analysis of ion¿beam¿induced oxidation of GaAs and AlGaAs
Alay, Josep Lluís; Vandervorst, Wilfried
Universitat de Barcelona
Semiconductors
Microelectrònica
Química analítica
Espectroscòpia d'electrons
Semiconductors
Microelectronics
Analytical chemistry
Electron spectroscopy
(c) American Institute of Physics 1992
Article
American Institute of Physics
         

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