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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Bosch i Puig, Salvador |
dc.date | 2012-05-07T08:33:28Z |
dc.date | 2012-05-07T08:33:28Z |
dc.date | 1992-01 |
dc.identifier.citation | 0734-2101 |
dc.identifier.citation | 59642 |
dc.identifier.uri | http://hdl.handle.net/2445/24984 |
dc.format | 7 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | Reproducció del document publicat a: http://dx.doi.org/10.1116/1.578073 |
dc.relation | Journal of Vacuum Science Technology A-Vacuum Surfaces and Films, vol. 10, núm. 1, pag. 98-104 |
dc.relation | http://dx.doi.org/10.1116/1.578073 |
dc.rights | (c) American Institute of Physics, 1992 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Disseny assistit per ordinador |
dc.subject | Pel·lícules fines |
dc.subject | Filtres òptics |
dc.subject | Lents |
dc.subject | Computer-aided design |
dc.subject | Thin films |
dc.subject | Light filters |
dc.subject | Lenses |
dc.title | Computer-aided procedure for optimization of layer thickness uniformity in thermal evaporation physical vapor deposition chambers for lens coating |
dc.title | info:eu-repo/semantics/publishedVersion |
dc.type | info:eu-repo/semantics/article |
dc.description.abstract |