Título:
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Plasma parameters of pulsed-dc discharges in methane used to deposit diamondlike carbon films
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Autor/a:
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Corbella Roca, Carles; Rubio-Roy, M.; Bertrán Serra, Enric; Andújar Bella, José Luis
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Otros autores:
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Universitat de Barcelona |
Abstract:
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Here we approximate the plasma kinetics responsible for diamondlike carbon (DLC) depositions that result from pulsed-dc discharges. The DLC films were deposited at room temperature by plasma-enhanced chemical vapor deposition (PECVD) in a methane (CH4) atmosphere at 10 Pa. We compared the plasma characteristics of asymmetric bipolar pulsed-dc discharges at 100 kHz to those produced by a radio frequency (rf) source. The electrical discharges were monitored by a computer-controlled Langmuir probe operating in time-resolved mode. The acquisition system provided the intensity-voltage (I-V) characteristics with a time resolution of 1 μs. This facilitated the discussion of the variation in plasma parameters within a pulse cycle as a function of the pulse waveform and the peak voltage. The electron distribution was clearly divided into high- and low-energy Maxwellian populations of electrons (a bi-Maxwellian population) at the beginning of the negative voltage region of the pulse. We ascribe this to intense stoc... |
Materia(s):
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-Metà -Electrons -Pel·lícules fines -Revestiments protectors -Aplicacions industrials -Plasma (Gasos ionitzats) -Methane -Electrons -Thin films -Protective coatings -Industrial applications -Plasma (Ionized gases) |
Derechos:
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(c) American Institute of Physics, 2009
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Tipo de documento:
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Artículo Artículo - Versión publicada |
Editor:
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American Institute of Physics
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