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Plasma parameters of pulsed-dc discharges in methane used to deposit diamondlike carbon films
Corbella Roca, Carles; Rubio-Roy, M.; Bertrán Serra, Enric; Andújar Bella, José Luis
Universitat de Barcelona
2012-05-07
Metà
Electrons
Pel·lícules fines
Revestiments protectors
Aplicacions industrials
Plasma (Gasos ionitzats)
Methane
Electrons
Thin films
Protective coatings
Industrial applications
Plasma (Ionized gases)
(c) American Institute of Physics, 2009
Article
American Institute of Physics
         

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