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Atomic structure of the nanocrystalline Si particles appearing in nanostructured Si thin films produced in low-temperature radiofrequency plasmas
Viera Mármol, Gregorio; Mikikian, M.; Bertrán Serra, Enric; Roca i Cabarrocas, P. (Pere); Boufendi, L.
Universitat de Barcelona
Estructura atòmica
Atomic structure
Thin films
Plasma (Ionized gases)
Pel·lícules fines
Plasma (Gasos ionitzats)
(c) American Institute of Physics, 2002
American Institute of Physics

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