Recommended citation for this document

Viera Mármol, Gregorio ; Huet, S. ; Bertrán Serra, Enric ; Boufendi, L.. "Polymorphous Si thin films from radio frequency plasmas of SiH4 diluted in Ar: A study by transmission electron microscopy and Raman spectroscopy". Universitat de Barcelona. 2012. <http://hdl.handle.net/2445/24793>. [Consulta: 19-12-14].