Para acceder a los documentos con el texto completo, por favor, siga el siguiente enlace: http://hdl.handle.net/2445/24885

The effect of substrate on high-temperature annealing of GaN epilayers: Si versus sapphire
Pastor Pastor, David; Cuscó i Cornet, Ramon; Artús i Surroca, Lluís; Iborra, Enrique; Jiménez, J.; Peiró Martínez, Francisca; González Díaz, Germán; Calleja Pardo, Enrique
Universitat de Barcelona
We have studied the effects of rapid thermal annealing at 1300¿°C on GaN epilayers grown on AlN buffered Si(111) and on sapphire substrates. After annealing, the epilayers grown on Si display visible alterations with craterlike morphology scattered over the surface. The annealed GaN/Si layers were characterized by a range of experimental techniques: scanning electron microscopy, optical confocal imaging, energy dispersive x-ray microanalysis, Raman scattering, and cathodoluminescence. A substantial Si migration to the GaN epilayer was observed in the crater regions, where decomposition of GaN and formation of Si3N4 crystallites as well as metallic Ga droplets and Si nanocrystals have occurred. The average diameter of the Si nanocrystals was estimated from Raman scattering to be around 3¿nm. Such annealing effects, which are not observed in GaN grown on sapphire, are a significant issue for applications of GaN grown on Si(111) substrates when subsequent high-temperature processing is required.
03-05-2012
Ciència dels materials
Cristal·lografia
Materials science
Crystallography
(c) American Institute of Physics, 2006
Artículo
American Institute of Physics
         

Mostrar el registro completo del ítem

Documentos relacionados

Otros documentos del mismo autor/a

Ibáñez i Insa, Jordi; Oliva Vidal, Robert; De la Mare, M.; Schmidbauer, M.; Hernández Márquez, Sergi; Pellegrino, Paolo; Scurr, D. J.; Cuscó i Cornet, Ramon; Artús i Surroca, Lluís; Shafi, M.; Mari, R. H.; Henini, M.; Zhuang, Q.; Godenir, A.; Krier, A.
Gacevic, Z.; Fernández-Garrido, S.; Rebled, J. M. (José Manuel); Estradé Albiol, Sònia; Peiró Martínez, Francisca; Calleja Pardo, Enrique
Eljarrat Ascunce, Alberto; López Conesa, Lluís; Magén, César; García-Lepetit, Noemí; Gacevic, Zarko; Calleja Pardo, Enrique; Peiró Martínez, Francisca; Estradé Albiol, Sònia
Eljarrat Ascunce, Alberto; López Conesa, Lluís; Magén, César; Gačević, Žarko; Fernández-Garrido, S.; Calleja Pardo, Enrique; Estradé Albiol, Sònia; Peiró Martínez, Francisca
Eljarrat Ascunce, Alberto; Gačević, Žarko; Fernández-Garrido, S.; Calleja Pardo, Enrique; Magén, César; Estradé Albiol, Sònia; Peiró Martínez, Francisca