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Quantitative x-ray photoelectron spectroscopy study of Al/AlOx bilayers
Batlle Gelabert, Xavier; Hattink, Bart Jan; Labarta, Amílcar; Åkerman, Johan J.; Escudero, Roberto; Schuller, Ivan K.
Universitat de Barcelona
An x-ray photoelectron spectroscopy (XPS) analysis of Nb/Al wedge bilayers, oxidized by both plasma and natural oxidation, is reported. The main goal is to show that the oxidation state¿i.e., O:(oxidize)Al ratio¿, structure and thickness of the surface oxide layer, as well as the thickness of the metallic Al leftover, as functions of the oxidation procedure, can be quantitatively evaluated from the XPS spectra. This is relevant to the detailed characterization of the insulating barriers in (magnetic) tunnel junctions
02-03-2012
Espectroscòpia de raigs X
Fotoelectrons
Espectroscòpia d'electrons
Materials magnètics
Photoelectrons
Electron spectroscopy
Magnetic materials
X-ray spectroscopy
(c) American Institute of Physics, 2002
Artículo
American Institute of Physics
         

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