This is the peer reviewed version of the following article: “Fargas Marques, A., Costa Castelló, R. (2017) Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators, 1-13.” which has been published in final form at [doi: 10.1007/s11071-017-3633-8]. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Self-Archiving."

Electrostatic parallel-plate actuators are a common way of actuating microelectromechanical systems, both statically and dynamically. Nevertheless, actuation voltages and oscillations are limited by the nonlinearity of the actuator that leads to the pull-in phenomena. This work presents a new approach to obtain the electrostatic parallel-plate actuation voltage, which allows to freely select the desired frequency and amplitude of oscillation. Harmonic Balance analysis is used to determine the needed actuation voltage and to choose the most energy-efficient actuation frequency. Moreover, a new two-sided actuation approach is presented that allows to actuate the device in all the stable range using the Harmonic Balance Voltage.

Peer Reviewed