Circuit modeling of a MEMS varactor including dielectric charging dynamics

All of RECERCAT

To access the full text documents, please follow this link: http://hdl.handle.net/2117/100953

Title:	Circuit modeling of a MEMS varactor including dielectric charging dynamics
Author:	Giounanlis, Panagiotis; Andrade Miceli, Dennis; Gorreta Mariné, Sergio; Pons Nin, Joan; Domínguez Pumar, Manuel; Blokhina, Elena
Other authors:	Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Abstract:	Electrical models for MEMS varactors including the effect of dielectric charging dynamics are not available in commercial circuit simulators. In this paper a circuit model using lumped ideal elements available in the Cadence libraries and a basic Verilog-A model, has been implemented. The model has been used to simulate the dielectric charging in function of time and its effects over the MEMS capacitance value.
Abstract:	Peer Reviewed
Subject(s):	-Àrees temàtiques de la UPC::Enginyeria elèctrica -Àrees temàtiques de la UPC::Enginyeria mecànica -Àrees temàtiques de la UPC::Enginyeria de la telecomunicació -Microelectromechanical systems -Sistemes microelectromecànics
Rights:
Document type:	Article - Published version Article
Published by:	Institute of Physics (IOP)
Share: