A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS

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Title:	A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS
Author:	Gorreta Mariné, Sergio; Pons Nin, Joan; Blokhina, Elena; Domínguez Pumar, Manuel
Other authors:	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Abstract:	This letter introduces a new second-order delta-sigma method for controlling the dielectric charge in contactless capacitive microelectromechanical systems. This method improves the one previously proposed by the authors, providing second-order quantization noise shaping and avoiding the plateaus typical of first-order strategies. The feasibility and the features of the new method are demonstrated both experimentally and through simulations.
Subject(s):	-Àrees temàtiques de la UPC::Enginyeria electrònica -Microelectromechanical systems. -Dielectric charging control -MEMS reliability -Sistemes microelectromecànics
Rights:	Attribution-NonCommercial-NoDerivs 3.0 Spain http://creativecommons.org/licenses/by-nc-nd/3.0/es/
Document type:	Article - Published version Article
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