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RECERCAT Home > Universitat Politècnica de Catalunya > Documents de recerca > View document

To access the full text documents, please follow this link: http://hdl.handle.net/2117/26822

Title: Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates
Author: López Martí, Gema; Ortega Villasclaras, Pablo Rafael; Voz Sánchez, Cristóbal; Martín García, Isidro; Colina Brito, Mónica Alejandra; Morales Vilches, Ana Belén; Orpella García, Alberto; Alcubilla González, Ramón
Other authors: Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Subject(s): -Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
-Nanoelectronics
-Nanoelectrònica
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Document type: Article - Published version
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