Título:
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Macroporous silicon for high-capacitance devices using metal electrodes
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Autor/a:
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Vega Bru, Didac; Reina Marsinyach, Jordi; Martin, Ferran; Pavón Urbano, Ramón; Rodríguez Martínez, Ángel
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Otros autores:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
Abstract:
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In this paper, high-capacity energy storage devices based on macroporous silicon are demonstrated. Small footprint devices with large specific capacitances up to 100 nF/mm(2), and an absolute capacitance above 15 mu F, have been successfully fabricated using standard microelectronics and MEMS techniques. The fabricated devices are suitable for high-density system integration. The use of 3-D silicon structures allows achieving a large surface to volume ratio. The macroporous silicon structures are fabricated by electrochemical etching of silicon. This technique allows creating large structures of tubes with either straight or modulated radial profiles in depth. Furthermore, a very large aspect ratio is possible with this fabrication method. Macroporous silicon grown this way permits well-controlled structure definition with excellent repeatability and surface quality. Additionally, structure geometry can be accurately controlled to meet designer specifications. Macroporous silicon is used as one of the electrodes over which a silicon dioxide insulating layer is grown. Several insulator thicknesses have been tested. The second capacitor electrode is a solid nickel filling of the pores prepared by electroplating in a low-temperature industry standard process. The use of high-conductivity materials allows reaching small equivalent series resistance near 1 a |
Abstract:
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Peer Reviewed |
Materia(s):
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-Àrees temàtiques de la UPC::Energies::Tecnologia energètica::Emmagatzematge i transport de l’energia -Àrees temàtiques de la UPC::Enginyeria electrònica -Silicones -Energy storage -Macroporous silicon -Porous silicon -Electrochemical etching -Electrodeposition -Electro-deposition -Electroplating -High-density capacitors -Energy storage -Energy storage -Electrochemical capacitors -Porous silicon -Arrays -Carbon -Supercapacitors -Density -Physics -Design -Silicones -Energia--Emmagatzematge |
Derechos:
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Attribution-NonCommercial-NoDerivs 3.0 Spain
http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
Tipo de documento:
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Artículo - Versión publicada Artículo |
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