Silicon micromachined lens antenna for THz integrated heterodyne arrays

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Title:	Silicon micromachined lens antenna for THz integrated heterodyne arrays
Author:	Llombart Juan, Nuria; Lee, Choonsup; Alonso del Pino, María; Chattopadhyay, Goutam; Jung Kubiak, Cecile; Jofre Roca, Lluís; Mehdi, Imran
Other authors:	Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. ANTENNALAB - Grup d'Antenes i Sistemes Radio
Abstract:	In this paper, we present the design, fabrication, and measurements of a lens THz antenna that can be fabricated using conventional photolithography and deep reactive etching processes. The antenna is composed of an extended hemispherical silicon lens and a leaky wave waveguide feed. Both elements are fabricated using silicon micromachining techniques, enabling the fabrication of future large antenna arrays with a parallel process. To show the concept, a first antenna prototype has been fabricated using this fabrication process. Measurements obtained at 550 GHz are presented.
Abstract:	Peer Reviewed
Subject(s):	-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Antenes i agrupacions d'antenes -Antennas (Electronics) -Photolithography -Terahertz technology -Leaky wave antennas -Lens -Silicon fabrication -Terahertz (THz) -Antenes (Electrònica) -Fotolitografia
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Document type:	Article - Published version Article
Published by:	Institute of Electrical and Electronics Engineers (IEEE)
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