Title:
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Procedure to characterize microroughness of optical thin films: application to ion-beam-sputtered vacuum-ultraviolet coatings
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Author:
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Ferré Borrul, Josep; Duparré, Angela; Quesnel, Etienne
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Other authors:
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Universitat de Barcelona |
Abstract:
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A method for characterizing the microroughness of samples in optical coating technology is developed. Measurements over different spatial-frequency ranges are composed into a single power spectral density (PSD) covering a large bandwidth. This is followed by the extraction of characteristic parameters through fitting of the PSD to a suitable combination of theoretical models. The method allows us to combine microroughness measurements performed with different techniques, and the fitting procedure can be adapted to any behavior of a combined PSD. The method has been applied to a set of ion-beam-sputtered fluoride vacuum-UV coatings with increasing number of alternative low- and high-index layers. Conclusions about roughness development and microstructural growth are drawn. |
Subject(s):
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-Òptica electrònica -Electron optics |
Rights:
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(c) Optical Society of America, 2001
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Document type:
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Article Article - Published version |
Published by:
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Optical Society of America
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