Title:
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Dielectric charge control in electrostatic MEMS positioners/varactors
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Author:
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Blokhina, Elena; Gorreta Mariné, Sergio; Lopez, David; Molinero Giles, David; Feely, Orla; Pons Nin, Joan; Domínguez Pumar, Manuel
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Other authors:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
Abstract:
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A new dynamical closed-loop method is proposed to control dielectric charging in capacitive microelectromechanical systems (MEMS) positioners/varactors for enhanced reliability and robustness. Instead of adjusting the magnitude of the control voltage to compensate the drift caused by the dielectric charge, the method uses a feedback loop to maintain it at a desired level: the device capacitance is periodically sampled, and bipolar pulses of constant magnitude are applied. Specific models describing the dynamics of charge and a control map are introduced. Validation of the proposed method is accomplished both through discrete-time simulations and with experiments using MEMS devices that suffer from dielectric charging. |
Abstract:
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Peer Reviewed |
Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica -Microelectronics -Microelectromechanical systems -Sistemes microelectromecànics -Microelectrònica |
Rights:
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Document type:
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Article - Published version Article |
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